Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements
نویسندگان
چکیده
منابع مشابه
Nanogap Pirani Sensor Operating in Constant Temperature Mode for Near Atmospheric Pressure Measurements
This paper presents a high sensitive micro-sensor designed for pressure measurements in a wide range around atmospheric pressure, for application in aerodynamics. The sensor is a temperature-resistance transducer operating with the Pirani effect, which states that below a certain pressure limit, the thermal conductivity of a gas is pressure-dependent. The sensor presents a wide measurement rang...
متن کاملPirani Pressure Sensor with Distributed Temperature Sensing
A Pirani pressure sensor is based on the fact that the thermal conductivity of a gas is dependent on the pressure. The structure presented in this paper consists of a heated microbeam, which is placed above a v-groove in a heat sink. The temperature distribution along the microbeam is a measure for the thermal conductivity of the surrounding gas. Measuring the temperature distribution instead o...
متن کاملPirani pressure sensor with distributed temperature measurement - Sensors, 2003. Proceedings of IEEE
pressure sensor with distributed temperature measurement B.R. de Jong, W.P.Bula, D. Zalewski, J.J. van Baar and R.J. Wiegerink MESA' Research Institute, University of Twente P.O. Box 217, NL-7500 AE Enschede, The Netherlands e-mail: [email protected] fax: +31 53 4893343 Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gapheights) of 0.3...
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A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheri...
متن کاملMultifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor
A multifunctional platform based on the microhotplate was developed for applications including a Pirani vacuum gauge, temperature, and gas sensor. It consisted of a tungsten microhotplate and an on-chip operational amplifier. The platform was fabricated in a standard complementary metal oxide semiconductor (CMOS) process. A tungsten plug in standard CMOS process was specially designed as the se...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2017
ISSN: 2504-3900
DOI: 10.3390/proceedings1040377